JPH017722Y2 - - Google Patents
Info
- Publication number
- JPH017722Y2 JPH017722Y2 JP15997282U JP15997282U JPH017722Y2 JP H017722 Y2 JPH017722 Y2 JP H017722Y2 JP 15997282 U JP15997282 U JP 15997282U JP 15997282 U JP15997282 U JP 15997282U JP H017722 Y2 JPH017722 Y2 JP H017722Y2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- diameter portion
- rotary
- fixed
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000007865 diluting Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 25
- 239000007787 solid Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 150000004679 hydroxides Chemical class 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- -1 and as a result Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Joints Allowing Movement (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15997282U JPS5964967U (ja) | 1982-10-22 | 1982-10-22 | 内付けcvd法用ロ−タリ−ジヨイント |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15997282U JPS5964967U (ja) | 1982-10-22 | 1982-10-22 | 内付けcvd法用ロ−タリ−ジヨイント |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5964967U JPS5964967U (ja) | 1984-04-28 |
JPH017722Y2 true JPH017722Y2 (en]) | 1989-03-01 |
Family
ID=30351993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15997282U Granted JPS5964967U (ja) | 1982-10-22 | 1982-10-22 | 内付けcvd法用ロ−タリ−ジヨイント |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5964967U (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6708521B2 (ja) * | 2016-08-23 | 2020-06-10 | 月島機械株式会社 | ロータリージョイント |
-
1982
- 1982-10-22 JP JP15997282U patent/JPS5964967U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5964967U (ja) | 1984-04-28 |
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